@inproceedings{a7f7532a2cd8459d92a63ada599e3682,
title = "Fabrication and characterization of high-speed PZT sensors for the investigation of ultrasonic wire bonding process",
keywords = "Piezoelectric properties, PZT sensor, Sputtering process, Ultrasonic wire bonding",
author = "Andreas Isaak and Yangyang Long and Esmail Asadi and Marc Wurz and Jens Twiefel and J{\"o}rg Wallaschek",
year = "2018",
month = jan,
day = "1",
doi = "10.15488/18537",
language = "English",
isbn = "9780995775121",
pages = "163--164",
editor = "O. Riemer and Enrico Savio and D. Billington and Leach, {R. K.} and D. Phillips",
booktitle = "Proceedings of the 18 international conference of the european society for precision engineering and nanotechnology",
publisher = "euspen",
note = "18th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2018 ; Conference date: 04-06-2018 Through 08-06-2018",
}