Lithography-Free Anisotropic Magnetoresistance Sensor-Based Rotational Speed Measurement System on PEEK with Integrated Electronics

Sensors for monitoring rotational speed play a crucial role in modern machines and vehicles, with their application steadily increasing, particularly in the implementation of digital twins. Anisotropic magnetoresistive (AMR) sensors are commonly used to measure rotational speed. These sensors are typically manufactured on silicon wafers and packaged as surface-mounted components. This paper presents a novel fabrication process that utilizes an injection-molded polyether ether ketone (PEEK) substrate as the carrier. The injection molding process prestructures the PEEK substrate, enabling the production of AMR sensors through deposition and polishing processes. The evaluated signals are processed on the backside of the PEEK substrate. A demonstrator has shown that this sensor system can accurately measure and display the rotational speed.