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Elektronenstrahllithografie Raith Voyager
Marc Christopher Wurz
(Head)
&
Folke Dencker
(Head)
Institute of Micro Production Technology
Facility/equipment
:
Major Research Instrumentation
Overview
Equipments Details
Details
Name
Elektronenstrahllithografie Raith Voyager
Manufacturers
Raith GmbH
Contact information
Emails
[email protected]