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Ionenimplanter Varian VIISta HCS

Laboratory of Nano and Quantum Engineering (LNQE)

Facility/equipment: Research Instrumentation

    Equipments Details

    Description

    Ionenimplanter für runde Wafer bis 300 mm Durchmesser, auch Solar, As, P, B, 5-60 keV (VARIAN VIISta HCS)

    Contact information

    NameJan Krügener, Oliver Kerker