Equipments Details
Description
UV Kontakt- und Proximity-Belichter für runde Wafer (Silizium und Germanium) bis 100 mm Durchmesser. Maskengröße 150*150 mm2 quadratisch, minimale Linienbreite 900 nm (SÜSS MA 150 und MA 6)
Equipment
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HMDS-Hotplate Süss VP8 T/BM
Kerker, O. (Equipment management)
Laboratory of Nano and Quantum Engineering (LNQE)Facility/equipment: Research Instrumentation
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Lackschleuder mit Heizplatte Süss Delta 80, HP8TT
Kerker, O. (Equipment management)
Laboratory of Nano and Quantum Engineering (LNQE)Facility/equipment: Research Instrumentation
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Mask-Aligner Süss MA 150
Kerker, O. (Equipment management)
Laboratory of Nano and Quantum Engineering (LNQE)Facility/equipment: Research Instrumentation