Multifunctional high-performance ion beam etching and coating system

Marc Christopher Wurz (Head)

Institute of Micro Production Technology

Research infrastructure/Equipment: Major Research Instrumentation

DFG Instrumentation Classification Key

Optics, Electron Optics / Electron Optical Devices / 5180 Electron and Ion Beam Sources

Contact information

Multifunctional high-performance ion beam etching and coating system
Wurz, M. C. (Principal Investigator)
1 Jun 2025 → 31 Dec 2028
Project: Research