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Probe station for the characterization of microelectronic systems

Research infrastructure/Equipment: Major Research Instrumentation

    Equipments Details

    Description

    Wafer probe station with Keithley parameter analyzer 4200A

    Details

    NameMPITS2000-DP
    ManufacturersMPI Corporation

    DFG Instrumentation Classification Key

    • Special Devices of Engineering Sciences / Telecommunications Technology / 2780 Special Measurement and Test Equipment for Semiconductors and Tubes (except 6200-6590)