Wessling, L.,
Fritze, A. L.,
de Wall, S.,
Kassner, A.,
Dencker, F., Overmeyer, L. &
Wurz, M. C.,
4 Mar 2026,
Laser-based Micro- and Nanoprocessing XX. Kling, R., Pfleging, W. & Sugioka, K. (eds.).
SPIE, 138810J. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 13881).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review