Research output per year
Research output per year
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Production of Aspheric Micro Lens Arrays by a Combination of Selective Laser Induced Etching and Laser Polishing
Wessling, L., Fritze, A. L., de Wall, S., Kassner, A., Dencker, F., Overmeyer, L. & Wurz, M. C., 4 Mar 2026, Laser-based Micro- and Nanoprocessing XX. Kling, R., Pfleging, W. & Sugioka, K. (eds.). SPIE, 138810J. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 13881).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
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Microtechnological Production of Integrated Optical Gratings Using Laser Beam Lithography for Atomic Interferometers
de Wall, S., Kassner, A., Dencker, F. & Wurz, M., 2023, Tagungsband MikroSystemTechnik Kongress 2023. 3 p.Research output: Chapter in book/report/conference proceeding › Conference contribution › Research
Open Access -
Performance Comparison of MR Sensors on Silicon and Bare PEEK (Polyether Ether Ketone) Wafers
de Wall, S., Bierwirth, T. N., Wurz, M. & Bengsch, S., 2023.Research output: Contribution to conference › Poster › Research
Open Access -
Anisotropic Magneto-Resistive Sensor Effect based Sensor using Daisy Chain on Polyether Ether Ketone Substrate
De Wall, S., Bengsch, S., Fischer, E., Dencker, F. & Wurz, M. C., 2021, 2021 IEEE Sensors. Institute of Electrical and Electronics Engineers Inc., (Proceedings of IEEE Sensors; vol. 2021-October).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
Open Access -
Mikrotechnologische Fertigung von integrierten optischen Gittern mittels Lift-Off-Prozess für den Einsatz in Atominterferometern
Translated title of the contribution :Microtechnological Production of Integrated Optical Gratings by means of a Lift-Off Process for Use in Atomic Interferometers Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
Projects
- 1 Finished
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QCHIP: Verbundprojekt: Erweiterung der Atomchiptechnologie mittels Oberflächen-Nanostrukturierung zu Quanten Chips (Q-Chips); Teilprojekt 4
Wurz, M. C. (Principal Investigator), de Wall, S. (Project staff) & Dencker, F. (Principal Investigator)
1 Sept 2019 → 28 Feb 2026
Project: Research