Abstract
This study characterizes the field emission and heat development properties of polycrystalline diamond (PCD) coatings on diced n-Si field emitters. The emitter chip package consists of a diced field emitter array and a gold-coated glass extraction electrode fabricated using the Selective Laser Etching (SLE) process. In an attempt to ameliorate heat expansion issues observed in uncoated arrays, a thin layer of PCD was incorporated into the system, leveraging the materials potentially high thermal conductivity and low work function. Additionally, a thermography camera was used to characterize the electron source. The experiments confirmed that PCD-coated emitters operate more stably at lower voltages and exhibit significantly lower and more uniform thermal profiles.
| Original language | English |
|---|---|
| Title of host publication | 2025 38th International Vacuum Nanoelectronics Conference, IVNC 2025 |
| ISBN (Electronic) | 979-8-3315-3705-0 |
| DOIs | |
| Publication status | Published - 8 Jul 2025 |
Keywords
- diamond
- silicon field emitters
- PCD
- glass extraction electrode
- SLE
- laser assisted bonding
- FEA
- dicing field emitters
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials
- Instrumentation
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