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Diamond Coating of Diced Si Field Emitters for Enhanced Field Emission Performance

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Abstract

This study characterizes the field emission and heat development properties of polycrystalline diamond (PCD) coatings on diced n-Si field emitters. The emitter chip package consists of a diced field emitter array and a gold-coated glass extraction electrode fabricated using the Selective Laser Etching (SLE) process. In an attempt to ameliorate heat expansion issues observed in uncoated arrays, a thin layer of PCD was incorporated into the system, leveraging the materials potentially high thermal conductivity and low work function. Additionally, a thermography camera was used to characterize the electron source. The experiments confirmed that PCD-coated emitters operate more stably at lower voltages and exhibit significantly lower and more uniform thermal profiles.

Original languageEnglish
Title of host publication2025 38th International Vacuum Nanoelectronics Conference, IVNC 2025
ISBN (Electronic)979-8-3315-3705-0
DOIs
Publication statusPublished - 8 Jul 2025

Keywords

  • diamond
  • silicon field emitters
  • PCD
  • glass extraction electrode
  • SLE
  • laser assisted bonding
  • FEA
  • dicing field emitters

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Instrumentation

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