@inproceedings{a68399061d4f411a8d7184c599915573,
title = "Fourier Scatterometry for Characterization of Sub-wavelength Periodic Two Photon Polymerization Structures",
abstract = "In the present paper we extend Fourier-Scatterometry by the use of the coherent properties of white light for the characterization of sub-wavelength periodic gratings of photosensitive material structured by two-photon polymerization. Our goal is a fast and precise optical characterization of periodical gratings of sub 100 nm size. The investigated structures include gratings produced by two-photon polymerization of photosensitive material and typical semiconductor test gratings. A Fourier-Scatterometer has been set up using a white light source and also additionally a reference-branch for white-light-interference (WLI). A sensitivity comparison between Fourier-Scatterometry and WLI-Scatterometry is presented.",
keywords = "Scatterometry, two-photon polymerization, white-light-interference",
author = "K. Frenner and Paz, \{V. Ferreras\} and S. Peterh{\"a}nsel and W. Osten and A. Ovsianikov and K. Obata and B. Chichkov",
year = "2011",
month = nov,
day = "14",
doi = "10.1063/1.3657911",
language = "English",
isbn = "9780735409651",
series = "AIP Conference Proceedings",
pages = "324--329",
booktitle = "Frontiers of Characterization and Metrology for Nanoelectronics",
note = "Frontiers of Characterization and Metrology for Nanoelectronics: 2011 ; Conference date: 23-05-2011 Through 26-05-2011",
}