@inproceedings{b950cd6baa034cef84231fe746d976a2,
title = "Mass production for micro end mills",
abstract = "Micro end milling processes are not economical, as the tools are quickly worn out and their production is too cost-intensive. For this reason a batch-capable manufacturing process has been developed, enabling a simultaneous production of several thousand of silicon carbide (SiC) micro end milling tools. The manufacturing method is a combination of photolithographic structuring of a SiC-wafer and deep reactive ion etching (DRIE). The single tool heads with a height of more than 150 μm and a diameter below 30 μm are afterwards mechanically separated from the wafer and added on a shaft. Main points of this investigation are the performance of the optimized micro end mills, the tool geometry reliability and the milling surfaces quality. A systematic investigation by confo-cal scanning microscopy and scanning electron microscopy ensure a selection and characterisation of the precision geometry of the tools and micro milled structures.",
keywords = "Batch process, Mass production, Micro end mills, Silicon carbide",
author = "Berend Denkena and Marc Wurz and Thilo Grove and Abdelhamid Bouabid and Esmail Asadi",
year = "2017",
month = may,
day = "30",
doi = "10.15488/18538",
language = "English",
series = "Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017",
publisher = "euspen",
pages = "245--246",
editor = "D. Phillips and D. Billington",
booktitle = "Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017",
note = "17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017 ; Conference date: 29-05-2017 Through 02-06-2017",
}