| Original language | German |
|---|---|
| Title of host publication | Mikroperipherik |
| Place of Publication | VDI/VDE-Technologiezentrum Berlin, Germany |
| Publication status | Published - 1992 |
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Neues Dienstleistungszentrum Mikrosystemtechnik in Chemnitz
- Bodo Heimann
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review