Abstract
We report on the stability of the c-Si surface passivation quality by aluminum oxide (AIOx), silicon nitride (SiNy), and AlOx/SiNy, stacks under UV illumination. Low-temperature annealed AlOx shows a weak degradation during UV illumination, with surface recombination velocities (SRVs) of 25 cm/s after a UV dose of 275 kWh/m2. This degradation is less pronounced compared to that of fired SiNy layers with an SRV of 117 cm/s. After a firing step, the AlOx layer show even an improvement during UV illumination, resulting in stabilized SRVs of down to 1 cm/s. The improvement is mainly due to an increase of the negative fixed charge density in the AlOx layer up to a large value of -1.2×1013 cm-2.
| Original language | English |
|---|---|
| Title of host publication | 2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017 |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 1366-1370 |
| Number of pages | 5 |
| ISBN (Electronic) | 978-1-5090-5605-7 |
| ISBN (Print) | 978-1-5090-5606-4 |
| DOIs | |
| Publication status | Published - 30 Jun 2017 |
| Event | 44th IEEE Photovoltaic Specialist Conference, PVSC 2017 - Washington, United States Duration: 25 Jun 2017 → 30 Jun 2017 |
Publication series
| Name | Photovoltaic Specialist Conference |
|---|---|
| ISSN (Print) | 0160-8371 |
Conference
| Conference | 44th IEEE Photovoltaic Specialist Conference, PVSC 2017 |
|---|---|
| Country/Territory | United States |
| City | Washington |
| Period | 25 Jun 2017 → 30 Jun 2017 |
UN Sustainable Development Goals (SDGs)
This output contributes to the following UN Sustainable Development Goals (SDGs)
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SDG 7 Affordable and Clean Energy
Keywords
- Aluminum oxide
- Carrier lifetime
- Crystalline silicon
- Degradation
- Silicon nitride
- Surface passivation
- UV stability
ASJC Scopus subject areas
- Renewable Energy, Sustainability and the Environment
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials
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